1200度双温区管式炉CVD系统设备\1400度CVD系统

石墨烯制备设备双温区滑轨式CVD系统系统由预热炉、双温区滑轨炉、质子流量控制系统、真空系统三部分组成。CVD（化学气象沉积系统）常用于表面材料生长、沉积，是一款实验室常用设备。

1200度滑动式快速退火管式炉温度可以达到1200度，极限真空可以达到10-3Pa，供气系统是流量调节可以是质子流量计，可以对多种气体进行精度的混气，然后导入到管式炉内部。
系列快速退火炉炉管两端安装真空法兰，真空度用分子泵可以到10-5Torr，机械泵可到10-3Torr。炉底安装一对滑轨，可用手动滑动。加热和冷却速率额定可达100°C/m。为取得设计快加热，可以预先加热炉子到设定的温度，然后移动炉子到样品位置。为获得设计快冷却，可在样品加热后移动炉子到另一端。加热和冷却速率在真空或者惰性气体环境下可以达到10°C/s，是低成本快速热处理的不错的高温炉。

双温区CVD系统设备技术参数

结构特点：

1、30段程序控温智能PID调节。（可选配50段程序仪表或液晶触摸屏仪表）

2、具有过温保护、断偶保护，过温或断偶时电炉加热电路会自动切断，
（当电炉温度超过1200度或热电偶烧断时，主电路上的交流继电器会自动断开，主电路断开，面板上ON灯熄灭，OFF灯亮，有限的保护电炉）。

3、带有485通讯接口（选购软件时标配）

4、具有断电保护功能，即断电后再给电启动炉子时、程序不是从起始温度开始升、而是从断电时炉温开始升。

5、仪表具有温度自整定的功能。
 

二、SGM DTF1200度双温区CVD系统开门保护系统：
该炉安装有行程开关，当炉盖打开时会自动切断电源，有效地保证使用者。
 

三、炉膛材料：采用氧化铝多晶纤维材料，不掉粉、材料保温性能好、反射率高、温场均衡，抗热涨冷缩能力强。
 

四、加热元件：采用良的加热元件，温场均衡、使用寿命长。
 

五、漏电保护功能：该炉装了漏电空气开关，当炉体漏电或电流超过额定电流时空开会自动关闭以切断电源。
 

六、软件控制系统（选购）：
该管式炉配有通讯接口和软件，可以直接通过电脑控制炉子的各个参数，并能从电脑上观察到炉子上PV和SV温度值和仪表的运行情况，炉子的实际升温曲线电脑会实时绘出，并能把每个时刻的温度数据保存起来，随时可以调出。
 

七、控制系统：
1、电器：正泰，2、可控硅：德国西门康106/16E，3触发器：移相触发。
 

八、选配件：
1、50段程序控温，2、液晶触摸屏控制器或温度控制器3、炉膛尺寸可定做

4、可增加进气、排气阀门
5、炉膛材料可选材料
6、可选UL认证电器板

7、电器部分可选配ABB产品
8、可根据客户需求定做各种非标型号产品

SGM DTF1200度双温区CVD系统产品描述：

CVD系统由供气系统+管式炉+抽气系统，采用双层壳体结构，炉膛采用氧化铝多晶纤维材料。双温区的管式炉每个温区可以立控制、设置不同的温度。供气系统是流量调节可以是质子流量计或浮子流量计，混气路数可以是2路、3路、4路、5路相混合。

SGM DTF1200度双温区CVD系统技术参数：

1.型号：?SGM DTF1200-C-I?SGM DTF1200-C-II

2.炉管长度：?Φ60X1200mm?Φ80X1200mm

3.高温度：1200℃4.额定温度：1350℃

5.功率：7KW6.电压：220V

7.各温区加热段：2加厚+2加厚8.热电偶：S型

9.升温速率：≤10℃/min

10.加热元件：硅碳棒

11.温控方式：智能化30段可编程控制

1、 SGM DTF1200 dual temperature zone CVD system temperature control instrument: Yudian program temperature control instrument. (it can be equipped with imported brands such as Japan island power and UK continental)

1. 30 segment program temperature control intelligent PID regulation. (50 segment program instrument or LCD touch screen meter can be selected)

2. It has over temperature protection and disconnection protection. The heating circuit of electric furnace will be cut off automatically in case of over temperature or disconnection. (when the temperature of electric furnace exceeds 1200 ℃ or the thermocouple is burnt out, the AC relay on the main circuit will be automatically disconnected, the main circuit will be disconnected, the on light on the panel will be off, the off light will be on, and the limited protection furnace will be provided).

3. With 485 communication interface (standard configuration when purchasing software)

4. It has the function of power-off protection, that is, when starting the furnace after power-off, the program does not start from the initial temperature, but starts to rise when the power is off.

5. The instrument has the function of temperature self-tuning.

2、 SGM DTF1200 double temperature zone CVD system door opening protection system: the furnace is equipped with a travel switch, when the furnace cover is opened, it will automatically cut off the power supply, effectively ensuring users.

3、 Furnace material: adopt alumina polycrystalline fiber material, no powder, good heat preservation performance, high reflectivity, balanced temperature field, strong resistance to heat expansion and cold contraction.

4、 Heating element: excellent heating element, balanced temperature field and long service life.

5、 Leakage protection function: the furnace is equipped with leakage air switch. When the furnace leakage or current exceeds the rated current, the meeting will automatically shut down to cut off the power supply.

6、 Software control system (optional): the furnace is equipped with communication interface and software, which can direcSGM DTFy control the parameters of furnace through computer, and observe the temperature value of PV and SV on the furnace and the operation of the instrument from the computer. The actual temperature rise curve of the furnace will be drawn by the computer in real time, and the temperature data of each moment can be saved and can be called out at any time.

7、 Control system: 1. Electrical appliances: Chint; 2. Silicon controlled rectifier: Siemens 106 / 16e; 3 trigger: phase-shifting trigger.

8、 Options: 1, 50 section program temperature control;
2. LCD touch screen controller or imported temperature controller;
3. Furnace size can be customized

4.
5. Furnace material can be imported.
6. UL certified electrical board can be selected

7. ABB products can be selected for electrical parts.
8. Various non-standard products can be customized according to customer requirements

The company to undertake a variety of non-standard furnace customized, welcome to inquire. The contact number is 13602195903, manager Zou, and wechat is the same number.

SGM DTF1200 dual temperature zone CVD System Product Description:

The CVD system is composed of gas supply system, tubular furnace and air extraction system. The double shell structure is adopted. The furnace is made of alumina polycrystalline fiber. Each temperature zone of tubular furnace with double temperature zones can be controlled and set with different temperatures independenSGM DTFy. The gas supply system is a flow regulator, which can be a proton flowmeter or a rotameter, and the number of gas mixing channels can be 2, 3, 4, 5 mixed.
 

Technical parameters of SGM DTF1200 dual temperature zone CVD system:

1. Model:? SGM DTF1200-c-i? SGM DTF1200-c-ii

2. Length of furnace tube:? Φ 60x1200 mm? Φ 80x1200 mm

3. High temperature: 1200 ℃; 4. Rated temperature: 1350 ℃

5. Power: 7kw6. Voltage: 220V

7. Heating section of each temperature zone: 2加厚 + 2加厚 8. Thermocouple: S type

9. Heating rate: ≤ 10 ℃ / min

10. Heating element: silicon carbide rod

11. Temperature control mode: intelligent 30 segment programmable control