前开门真空井式坩埚炉\小型实验坩埚炉
SGM 1200℃前开门真空井式坩埚炉是由洛阳西格马高温电炉小型实验坩埚炉。
西格马小型真空坩埚炉集控制系统与炉膛一体，其中炉膛保温材料采用陶瓷纤维真空吸附成型，加热元件采用质硅钼棒。超大口径的石英炉腔和真空密封法兰系统，可在流动气氛和真空状态下快速加热样品。主要用于煅烧真空或惰性气体中的高纯度化合物，退火或扩散半导体晶片；也可用于烘烧或烧结陶瓷材料。
Sigma small vacuum crucible furnace integrates control system and furnace. Ceramic fiber vacuum absorption molding is used as furnace insulation material, and high-quality silicon molybdenum rod is used as heating element. The ultra large diameter quartz furnace chamber and vacuum sealing flange system can quickly heat the sample in flowing atmosphere and vacuum. It is mainly used for calcining high-purity compounds in vacuum or inert gas, annealing or diffusion of semiconductor wafers, and can also be used for baking or sintering ceramic materials.
主要特点Main features:
集控制系统与炉膛为一体
Integrated control system and furnace
高品质惨钼铁铬铝合金作为加热元件，可加热到1100℃
High quality Mo Fe Cr Al alloy can be heated to 1100 ℃
炉膛保温材料采用整体真空吸附成型，节能环保
The furnace insulation material adopts the whole vacuum adsorption molding, which is energy-saving and environmental protection
大口径的石英炉腔和真空密封法兰系统，可以在流动气氛和真空状态下快速加热样品
The large diameter quartz furnace chamber and vacuum sealing flange system can quickly heat the sample in flowing atmosphere and vacuum
内置30段可编程精密数字温度控制器可控制升降温速率
The built-in 30 segment programmable precision digital temperature controller can control the temperature rise and fall rate
技术参数Technical Parameters
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电炉名称 name |
前开门真空井式坩埚炉 Vacuum well crucible furnace with front door |
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开门方式 open |
前开门
Front door |
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Working Temperature 工作温度 |
Max. Temperature: 1200 °C ( 1 hr) 额定温度：1200℃ (1小时) Continuous working temperature: ≤1100℃ 持续工作温度：≤1100℃ Max. heating Rate: ≤15°C /min 设计快升温速率：≤40℃/分 |
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Temperature Controller 控温方式 |
PID automatic control and auto-tune function. 模糊PID控制和自整定调节 30 programmable segments for precise thermal processing. 智能化30段可编程控制 Built-in protection for the over-heated and broken thermocouple. 超温和断偶报警功能 |
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Heating Elements 加热元件 |
Resistance wire, Fe-Cr-Al Alloy doped by Mo 电阻丝（掺钼铁铬铝合金） |
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Temperature Accuracy 控温精度 |
+/- 1℃ |
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Chamber size炉膛有效尺寸 |
Φ210*340mm |
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Dimensions 尺寸 |
Furnace size: 510*435*425mm(L*W*H ) 炉子尺寸：510*435*425mm(长*宽*高 ) |
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Net Weight 净重 |
70kg |
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Shipping Weight 毛重 |
100kg |
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真空法兰 |
Special designed flanges 定制法兰 |
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Vacuum Pressure 真空压力 |
133torr can be achieved by mechanical pump 机械泵可达133torr（1pa） 10^-5 torr can be reached by molecular pump 分子泵可达10^-5torr（10^-3pa） Please click the picture below to order vacuum parts 点击下列图片订购真空部件
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Power 输入电源 |
Power rated: 3KW 额定功率：3KW |
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Voltage 电压 |
Voltage rated: AC220V 50/60HZ 额定电压： AC220V 50/60HZ |
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Warranty 质保 |
Two year limited warranty with lifetime support (Such consumable parts as tO-rings, etc. are NOT supported by the warranty) 二年质保终身支持（消耗品如O型圈等不在质保范围内） |
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Warning 注意事项 |
Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating. 在使用过程中炉膛表面可能出现细小裂纹。这是正常情况，裂纹可以用氧化铝涂层修复。 |
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Compliance 认证 |
CE Certified CE认证 The furnace is ready to pass TUV (UL61010) or CSA certification at extra cost. 可付费进行TUV(UL61010)或CSA认证 |
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Operation instructions 操作指导 |
Click to download the operating manual 点击下载说明书 |
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